DUMMY LOADPORT(DLP)
Clean room Transfer station for ＂8-inch Pod＂ or ＂12-inch Foup, made of aluminum extrusion and antistatic material, mounting with shock-proof quick release clamp. Modular design able to support future expansion.
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| 料號 | 品項名稱[規格] | 入庫數量 | 總數量 | 日期 |
|---|---|---|---|---|
| C-004-01 | 未測試-Transceiver W/ Recorder (OTF) | 200 | 1745 | 1100816 |
| C-002-01 | PCB板/CONTROLLER | 100 | 260 | 1100816 |
| D-007-010-01 | 線材/E84 Sensor/RJ11線/8M | 200 | 1696 | 1100816 |
MULTI-ANTENNA RFID Rack(E-Rack)
12~16 Lots
12-ince FOUP or 8-inch Pod Applicable.
Customize in different form or dimensions Mobile Robot Support Ready!
Push Button Programmable LED Indicator (Red, Green).
Multiple types of antenna (Position adjustable).
Photoelectric switch (Position Adjustable) LED Array board (18 Digit / RS-485 / Modularized, easy for installation)
| Product | MULTI-ANTENNA RFID Rack |
|---|---|
| Model | APS-01201 |
| Description | ・12~16 Lots ・12-ince FOUP or 8-inch Pod Applicable. ・Customize in different form or dimensions ・Mobile Robot Support Ready! ・Push Button Programmable LED Indicator (Red, Green). ・ Multiple types of antenna (Position adjustable). ・Photoelectric switch (Position Adjustable) ・LED Array board (18 Digit / RS-485 / Modularized, easy for installation) ・ |
| Specifications | ・1 Controller to 16 LF/UHF RFID Antenna ・Present Sensor OR System Polling Trigger ・SECS/GEM, TCP/IP Protocol or Data Base Report Ready (Ethernet/WIFI)! ・Screen(HDMI) and Keyboard/Mouse (USB) Support ・1D/2D Bar-code Reader Support (USB) |
N2/XCDA PURGE LOADPORT(N2P)
Nitrogen and XCDA filling equipment for 8-inch / 12-inch / Reticle carrier type, Extending Wafer storage time by controlling temperature and humidity in the carrier.
| Product Name | N2/XCDA PURGE LOADPORT |
|---|---|
| Model | APS-01301 |
| Description | Nitrogen and XCDA filling equipment for 8-inch / 12-inch / Reticle carrier type, Extending Wafer storage time by controlling temperature and humidity in the carrier. |
| Specifications | ・Conform to Semi E84 ・N2/XCDA purge Support Ready ・Status Indicator ・Display with touch screen ・RFID / SMART TAG data reader function ・PRESENCE / PLACEMENT Presence and Placement sensor as safety device ・OHT/Mobile Robot Support Ready ・SECS/GEM, TCP/IP Protocol or Data Base Report Ready ・Auto Charge for APS-Carrier Status Monitor Tool ・ Auto Data Download for APS-Carrier Status Monitor humidity Tool |
ZIP Stocker-200
ZIP Stocker Type: 200mm and 300mm
| ZIP Stocker Type | 200mm |
|---|---|
| Model | APS-01401 |
| Dimension | 1840*1350*3193(mm) |
| Carrier | 8¡¨ POD |
| Max.Bin Capacity | 63 |
| Cycle Time | UPH > 200 |
| Interfaces | OHT/MR/PGVPort |
| SECS E84 Compliance | |
| (other communication protocolcould be feasible after further discussion) | |
| Cleanness | CLASS 100 |
| Reader | RFID/Smart Tag |
| Features | ・Stocker StatusMonitoring Function ・Stocker status monitoring include: 1. PLC communication state 2. nventory state 3. Shelf state 4. Crane state Stocker HMI 1. Vendor Company Logo 2. Stocker Name 3. Stocker status/Control mode 4. User Info 5. Function List 6. Shelf Info Area 7. Color Info 8. Crane Status 9. Transfer Command Area 10. Data Transfer Status 11. Stocker Status |
ZIP Stocker-300
ZIP Stocker Type: 200mm and 300mm
| ZIP Stocker Type | 300mm |
|---|---|
| Model | APS-01402 |
| Dimension | 2160*1700*3268(mm) |
| Carrier | 12¡¨ FOUP |
| Max.Bin Capacity | 53 |
| Cycle Time | UPH > 200 |
| Interfaces | OHT/MR/PGVPort |
| SECS E84 Compliance | |
| (other communication protocolcould be feasible after further discussion) | |
| Cleanness | CLASS 100 |
| Reader | RFID |
| Features | ・Stocker StatusMonitoring Function ・Stocker status monitoring include: 1. PLC communication state 2. nventory state 3. Shelf state 4. Crane state Stocker HMI 1. Vendor Company Logo 2. Stocker Name 3. Stocker status/Control mode 4. User Info 5. Function List 6. Shelf Info Area 7. Color Info 8. Crane Status 9. Transfer Command Area 10. Data Transfer Status 11. Stocker Status |